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Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
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'''PATH [‘name’]'''
'''PATH [‘name’]'''
The PATH command defines the start of a writing path and defines the initial calibration routine carried out before pattern exposure as well as the cyclic calibration routine carried out during exposure. The PATH name refers to the exact name of the PATH as it exists on the system, the full list of available paths is available here [LINK].
The PATH command defines the start of a writing path and defines the initial calibration routine carried out before pattern exposure as well as the cyclic calibration routine carried out during exposure. The PATH name refers to the exact name of the PATH as it exists on the system, the full list of [[Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist|available paths is available here.]]  


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