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Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
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Chip placement on a 4" wafer constrained to a 3.6" circle using '''JOB /W ‘name’, 4, 3.6''' as header line.
Example of a 10 x 10 chip array on a 4" wafer using a 3.6" circular cutout. Notice that chips must fall completely outside the boundary to be omitted. Pre exposure pattern placement visualization is done with the ACHK program.
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Figure 2: Example of a 10 x 10 chip array on a 4" wafer using a 3.6" circular cutout. Notice that chips must fall completely outside the boundary to be omitted. Pre exposure pattern placement visualization is done with the ACHK program.


'''PATH [‘name’]'''
'''PATH [‘name’]'''
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