Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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== Job Deck File == | == Job Deck File == | ||
One or more Jobdeck files (.jdf) is needed for an exposure. As a minimum the JDF file must contain information of what pattern to write and where to write it. It can also be used to specify alignment information. The filename is limited to 24 characters, no capital letters and no spaces. | One or more Jobdeck files (.jdf) is needed for an exposure. As a minimum the JDF file must contain information of what pattern to write and where to write it. It can also be used to specify alignment information. The filename is limited to 24 characters, no capital letters and no spaces. | ||
The JDF file has a common block and one or more layer blocks. The layer blocks can be used to define several patterns and several writing conditions in a single file. A simple example of a JDF is given below. | The JDF file has a common block and one or more layer blocks. The layer blocks can be used to define several patterns and several writing conditions in a single file. A simple example of a JDF with a single layer block is given below. | ||
<pre> | <pre> | ||
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</pre> | </pre> | ||
===JDF | ===JDF common block=== | ||
'''JOB [/W] [‘name’], d1 [, d2]''' | '''JOB [/W] [‘name’], d1 [, d2]''' | ||