Specific Process Knowledge/Back-end processing/Wire Bonder: Difference between revisions

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Revision as of 14:39, 27 March 2023

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Unless otherwise stated, this page is written by DTU Nanolab internal

TPT Wire Bonder

TPT Wire Bonder,
Packlab, Building 347, 1st floor

Will be temporary taken out of service during the PolyFabLab construction.

The TPT Wire Bonder is bought i 2007. Wire bonding is a method of making interconnections between a microchip and other electronics as part of semiconductor device fabrication. The TPT-H05 is a manuel wire bonder. It is possible to do wedge bonding with either aluminum wires or gold wires as well as gold ball bonding.

The user manual(s), user APV(s), technical information and contact information can be found in LabManager:

TPT Wire Bonder

Ball Wire Bonder K&S 4524

The Ball Wire Bonder K&S 4524,
Packlab, Building 347, 1st floor
Wire bondings: Left: wedge bonding - Right: ball bonding

Will be moved to building 451 during the PolyFabLab construction.

The Ball Wire Bonder K&S 4524 is for high precision ball bonding. It is a semi-automatic wire bonder with good control of bond placement and bonding parameters.

The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:

Ball Wire Bonder


Equipment performance and process related parameters

Equipment TPT Wire Bonder Ball Wire Bonder
Purpose
  • Al and Au 25µm wire bonding
  • Wedge and ball wire bonding
  • Au ribbon (100x20µm) bonding
    (we have tools and wire but it has not been tested)
  • Au 25µm wire bonding
  • Ball wire bonding
Performance
  • Manual operation
  • Wedge bonding:
    • recommended min. bonding area 200 µm x 200 µm
  • Ball bonding:
    • recommended min. bonding area 200 µm x 200 µm
    • recommended temperature 120 oC.
  • Semi-automatic and manual operation
  • Bond placement laser pointer
  • recommended min. bonding area 100 µm x 100 µm
  • recommended temperature 120 oC.
Substrates Allowed materials
  • Should be able to withstand the wire bonding temperature
  • Typical materials are: Alumina (Al2O3), AluminumNitride (AlN), std. circuit boards (FR4)


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