Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
| Line 63: | Line 63: | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
*Max. 2000 SCCM | *Max. 2000 SCCM | ||
|style="background:WhiteSmoke; color:black;" align="left"|'''Not tested'''. | |style="background:WhiteSmoke; color:black;" align="left"|'''Not tested'''. No recipes available. | ||
|- | |- | ||
|style="background:Silver; color:black"|5% H<sub>2</sub>/Ar | |style="background:Silver; color:black"|5% H<sub>2</sub>/Ar | ||