LabAdviser/Courses/TPT Dry Etch

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The Dry Etch TPT

DTU Nanolab offers a Tool Package Training in dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.

The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.

Dry Etch Tool Package Training
Signing up for the course - Course material	The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Dry Etch". Log into DTU Learn here: DTU Learn Select the menu "Discover" Search for "Nanolab" Select the course "DTU Nanolab TPT:Dry Etch" Press "Enroll in Course" You have now signed up for the course. Go to the course page in DTU Learn and choose "Course Content" and "Content" You have to read it all and go through all the material in the Dry Etch TPT.
Learning Objectives	Know why and when to use dry etching Use the dry etchers without harming the machines Select the right instrument to use for his/her dry etch processing Select an appropriate etch recipe for his/her dry etch processing Spot when the recipe needs to be tuned for his/her needs and Suggest relevant tuning parameters

Material for preparations and further information (You will also find this in the course material inside DTU Learn)

Literature No extra Literature at the moment Slides from Lecture Lecture powerpoint slide show File:TPT Dry etching April2018.pptx Lecture slides with explanatory text included [1], requires login	Lecture videos (Watch before the question and evaluation session) The 9 lecture videos can be found on YouTube here: Lecture videos Pre hands-on training videos (Watch before the hands-on training) The 13 pre hands-on training vidoes can be found on You Tube here:Pre hands-on training videos