Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

@@ Line 212: / Line 212: @@
 '''Overlay accuracy (spec):''' 1.0 µm
-'''BSA windows:''' along the X and Y axes, 10mm x 46mm, starting 14.5 mm from the center.
+'''BSA windows:''' along the X and Y axes, 10 mm x 46 mm, starting 14.5 mm from the center.
 '''Camera field of view (W x H):''' 640 µm x 480 µm
@@ Line 234: / Line 234: @@
 |- align="center"
-| BSA marks positioned at x = ±20mm on a 2" wafer ||  BSA marks positioned at x = ±40mm on a 4" wafer || BSA marks positioned at x = ±50mm on a 6" wafer
+| BSA marks positioned at x = ±20 mm on a 2" wafer ||  BSA marks positioned at x = ±40 mm on a 100 mm wafer || BSA marks positioned at x = ±50 mm on a 150 mm wafer
 |}