Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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|+'''Camera views during alignment on Aligner: Maskless 02''' | |+'''Camera views during alignment on Aligner: Maskless 02. Screenshots by Thomas Anhøj @ DTU Nanolab, 2019.''' | ||
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|[[Image:MLA150 TSA Overview.JPG|300px]] | |[[Image:MLA150 TSA Overview.JPG|300px]] | ||
|[[Image:MLA150_BSA_Backside.JPG|300px]] | |||
|[[Image:MLA150_TSA_Low_Res.JPG|300px]] | |[[Image:MLA150_TSA_Low_Res.JPG|300px]] | ||
|- align="center" | |- align="center" | ||
| Overview camera image of a TSA alignment mark during alignment.<br/> The circle is 3 mm in diameter, the alignment mark is 300 µm. The blue cross-hair is ~400 µm. || Low Res camera image of a TSA alignment mark during alignment.<br/> The | | Overview camera image of a TSA alignment mark during alignment.<br/> The circle is 3 mm in diameter, the alignment mark is 300 µm. The blue cross-hair is ~400 µm. || Low Res camera image of a TSA alignment mark during alignment.<br/> The mark is 300 µm wide. The blue cross-hair is ~18 µm. || High Res camera image of a TSA alignment mark during alignment.<br/> The lines of the cross are 20 µm wide. The blue cross-hair is ~7 µm. | ||
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'''Alignment test:''' | '''Alignment test:''' | ||
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'''Alignment test with scaled first print:''' | '''Alignment test with scaled first print:''' | ||