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Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide: Difference between revisions

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= Table of important subprograms =
= Table of important subprograms =
Calibration of condition files normally consists of a number of subprograms listed in the table below. The subprograms listed in the blue part of the table are a part of the 'daily' batch of programs.
Below is a brief explanation of some of the most important subprograms found in the '''Calibration''' window. The subprograms listed in the blue part of the table are a part of the 'daily' batch of programs.


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