Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide: Difference between revisions
| Line 177: | Line 177: | ||
|} | |} | ||
==System self | ==System self calibration== | ||
With the correct condition file restored the next step is to measure beam current and verify that it is close to the expected value (within 5%). | With the correct condition file restored the next step is to measure beam current and verify that it is close to the expected value (within 5%). | ||