Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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Every pattern must be part of an array to be exposed. Even in the simplest case where a single instance is to be written in the center of a substrate it must be defined with the ARRAY command. The ARRAY command essentially defines array points, i.e. points where pattern elements can be assigned to. Hence it works in conjunction with the ASSIGN command. The ARRAY command has six variables where x and y are the center coordinate of element (1,1) in µm, nx and ny are the number of array elements in x and y and dx and dy are the x- and y-axis pitches in µm. Notice that element (1,1) is the top left element of the array, additional x-axis elements are placed to the right of it and additional y-axis elements are placed below it. The JDF example above defines a 3 x 2 array with element (1,1) centered at (-750,250), x-axis pitch is 500 µm and y-axis pitch is 750 µm, as illustrated in Figure 3. | Every pattern must be part of an array to be exposed. Even in the simplest case where a single instance is to be written in the center of a substrate it must be defined with the ARRAY command. The ARRAY command essentially defines array points, i.e. points where pattern elements can be assigned to. Hence it works in conjunction with the ASSIGN command. The ARRAY command has six variables where x and y are the center coordinate of element (1,1) in µm, nx and ny are the number of array elements in x and y and dx and dy are the x- and y-axis pitches in µm. Notice that element (1,1) is the top left element of the array, additional x-axis elements are placed to the right of it and additional y-axis elements are placed below it. The JDF example above defines a 3 x 2 array with element (1,1) centered at (-750,250), x-axis pitch is 500 µm and y-axis pitch is 750 µm, as illustrated in Figure 3. | ||
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| [[image:JDF_ARRAY.png|843px]] | |||
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Visualization of the array defined using the '''ARRAY''', '''ASSIGN''' and '''SKIP''' commands in the example JDF. Illustration: Thomas Pedersen. | |||
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'''ASSIGN P(i) -> ((j,k),t)''' | '''ASSIGN P(i) -> ((j,k),t)''' | ||
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The ASSIGN command can be used to build arrays of arrays to a depth of 9 sub arrays. For examples of sub arrays please refer to our specific page on the ASSIGN command. | The ASSIGN command can be used to build arrays of arrays to a depth of 9 sub arrays. For examples of sub arrays please refer to our specific page on the ASSIGN command. | ||
'''SKIP (j,k)''' | '''SKIP (j,k)''' | ||