Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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Example feature filled with beam shots at one times beam diameter (left) and half beam diameter (right). Illustration: Thomas Pedersen. | Example feature filled with beam shots at one times beam diameter (left) and half beam diameter (right). Illustration: Thomas Pedersen. | ||
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The shot time can be calculated as t = D·p<sup>2</sup>/I, where D is the dose in µC/cm<sup>2</sup> and I is current. | |||