Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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*Some cassettes have engraved slot ID's | *Some cassettes have engraved slot ID's | ||
Cassettes are either made in aluminium or titanium. The thermal expansion coefficient of titanium is about | Cassettes are either made in aluminium or titanium. The thermal expansion coefficient of titanium is about one third of that of aluminium. Hence thermal drift is reduced on titanium cassettes. | ||
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