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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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|-
|Tested etch time without burning the resist
|Tested etch time without burning the resist
|3 min
|3 min (6 min => resist burned)
|30 min
|30 min
|-
|-
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