Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch: Difference between revisions
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==Etch Profile SEM images== | |||
<gallery caption="Profile of etch for 'Slow Etch2' 12 min" widths="300px done by bghe, DTU Nanolab" heights="300px" perrow="2"> | |||
File:C08507_01.jpg | |||
File:C08507_02.jpg | |||
File:C08507_04.jpg | |||
</gallery> | |||
==Etch Uniformity maps== | |||
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<gallery caption="Map of etch rate measurements for 'Slow Etch'" widths="300px" heights="300px" perrow="2"> | <gallery caption="Map of etch rate measurements for 'Slow Etch'" widths="300px" heights="300px" perrow="2"> | ||