Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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| PEC || Used to apply Proximity Effect Correction to a pattern | | PEC || Used to apply Proximity Effect Correction to a pattern | ||
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| | | ChipPlace || Graphical interface to set up arrays of patterns and assign dose to each element, excellent for dose testing | ||
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| Example || Example | | Example || Example | ||