Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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== Proximity Effect Correction == | == Proximity Effect Correction == | ||
Apart from conversion to V30 the prime use of Beamer is to do Proximity Effect Correction (PEC). This is done through the PEC node. The PEC node has a quite a few options and different ways to define a Point Spread Function (PSF). The PSF is a radially symmetric function around the beam spot that defines dose received by the resist both due to the incident beam but also from scattered electrons. The PSF used in Beamer can be defined in two ways; either based on gaussian functions where the user supplies the parameters used to define the functions, or the PSF can be based on Monte Carlo simulations of electron scattering. | |||
== Beamer == | == Beamer == | ||