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Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
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*Go to the '''Texts''' pane in the bottom window
*Go to the '''Texts''' pane in the bottom window
*Enter '''$DOSE_REL(3)$''' to have the relative dose printed with 3 decimals accuracy
*Enter '''$DOSE_REL(3)$''' to have the relative dose printed with 3 decimals accuracy
*Choose array 1 in '''Array ID''' to assign the text label to that array
*Assign text labels to all array elements with the '''(*,*,2)''' command. The "2" sets the relative dose of the labels to 2
*Assign a y-axis offset of for instance -100 µm to avoid having the label printed on top of the pattern itself
*Assign a decent size in the '''Size''' window, 20 µm will work for most cases




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The array and dose assignment can be set up with just a few inputs. Image: Thomas Pedersen.
The array and dose assignment can be set up with just a few inputs. Dose label are not visible in this view. Image: Thomas Pedersen.
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