Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
| Line 187: | Line 187: | ||
*Add the Chipplace node | *Add the Chipplace node | ||
*In the '''Substrate''' tab define the substrate size. This is purely for visualization of how the pattern fits on the substrate | *In the '''Substrate''' tab define the substrate size. This is purely for visualization of how the pattern fits on the substrate | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||
| Line 196: | Line 194: | ||
| colspan="2" style="text-align: center;| | | colspan="2" style="text-align: center;| | ||
Import a design and add the Chipplace node. In Chipplace choose a substrate size to visualize placement within the substrate. Image: Thomas Pedersen. | Import a design and add the Chipplace node. In Chipplace choose a substrate size to visualize placement within the substrate. Image: Thomas Pedersen. | ||
|} | |||
*Go to the '''Array and Data tab''' | |||
*Click '''Add Array''' | |||
*In '''Data to place''' choose '''Chip'''. It will then take the pattern connected to the Chipplace module | |||
*Fill in array data in '''Repitition''' and '''Pitch''' to create as many dose test instance as you want. In this case we create a 10 x 2 array | |||
*Choose '''Center''' in '''Position Mode''' to have everything centered in the final output pattern (V30 file) | |||
*Click '''Assign Dose''' to open up the dose assignment page | |||
*Choose '''Dose Series''' and enter a start and end value. This is relative dose, i.e. a multiplier on the base dose defined by RESIST in the SDF file | |||
*Choose '''Raster X''' in '''Deploy Mode''' to increase dose from left to right for all rows | |||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | |||
|- | |||
| [[image:BEAMER_3.png|600px]] || [[image:BEAMER_4.png|600px]] | |||
|- | |||
| colspan="2" style="text-align: center;| | |||
The array and dose assignment can be set up with just a few inputs. Image: Thomas Pedersen. | |||
|} | |} | ||