Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

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+=Dose test with Chipplace=
+A pattern can easily be set up for a dose test using the Chipplace module. In Chipplace one can set up a pattern to be instanced a number of time and easily assign each instance a dose. The dose can be manually set or be linearly interpolated between a start and end value for the instanced array. The output of Chipplace is a single pattern file with all array elements assigned to individual doses (shot ranks). This also works with patterns that already have PEC applied. In that case Chipplace will create a combined modulation of the PEC modulation and the dose test modulation. In the example below we demonstrate how to set up dose test without PEC. If PEC is needed a PEC node can simply be added before the Chipplace node.
+Work in progress. THOPE 2023-02-24