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Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

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=Job file verification=
=Job file verification=
To ensure that the pattern and exposure parameters are correct the MGN file should always be verified to some extent. This can be done using the Array Check Program '''(ACHK)''' program found on the '''Analysis''' pane. The '''Analysis''' pane is usually open on the right hand side of the second desktop, if not, it can be opened from the '''EBX Menu.''' Open '''ACHK''' from the '''Analysis''' pane and click “File” -> “Open” and open your magazine file.
To ensure that the pattern and exposure parameters are correct the MGN file should always be verified to some extent. It is rarely feasible or necesarry to manually validate all parts of a design but one should at least inspect a few parts of the pattern to verify it looks correct and also verify that pattern placement is as expected. This can be done using the Array Check Program '''(ACHK)''' found on the '''Analysis''' pane. The '''Analysis''' pane is usually open on the right hand side of the second desktop, if not, it can be opened from the '''EBX Menu.''' Pattern check can be done by the following procedure
 
*Open '''ACHK''' from the '''Analysis''' pane
*Click “File” -> “Open” and open your magazine file


=Sample mounting=
=Sample mounting=