Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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| 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|800px]] | | 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|800px]] | ||
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| 3" || BM4P-025 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-025_cas.png|800px]] | |||
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| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|800px]] | | 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|800px]] | ||