Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 505: Line 505:
*In the '''Expose''' program click '''File''' and '''Magazine File...'''
*In the '''Expose''' program click '''File''' and '''Magazine File...'''
*Browse for and select the correct file and click '''OK'''
*Browse for and select the correct file and click '''OK'''
*The '''Expose''' window is now updated with the file loaded into the '''Magazine filename:''' field
*Click '''Execute'''
*This opens the '''Pattern writing execution check''' window where one can check that the cassette number, slot ID and execution time is as expected before hitting '''Yes'''




Line 513: Line 516:
|-  
|-  
| colspan="1" style="text-align:center;|
| colspan="1" style="text-align:center;|
'''Expose''' window with .mgn file loaded for exposure. Image: Thomas Pedersen.
'''Expose''' window with .mgn file loaded for exposure. Notice that the '''Progress''' part of the window still shows the previous exposure information. This field will not update until exposure is started. Image: Thomas Pedersen.
|}
 
 
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
|-
| [[image:9500expose2.png|500px]]
|-
| colspan="1" style="text-align:center;|
. Image: Thomas Pedersen.
|}
|}