Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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Example of beam offset matrix shown during auto calibration. Average beam offset is below 1 nm | Example of beam offset matrix shown during auto calibration. Average beam offset is below 1 nm within the 1000 x 1000 µm<sup>2</sup> writing field in this example. Image: Thomas Pedersen. | ||
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