Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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At the end of the process the '''Calibration''' window will display '''Finished BATCH CALIB'''. | During calibration the system will measure and display the beam position at 49 location of the writing field. The position error (in nm) can be read of the matrices during execution, an example is shown below. At the end of the process the '''Calibration''' window will display '''Finished BATCH CALIB'''. | ||
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Example of beam offset matrix shown during auto calibration. Average beam offset is below 1 nm with the 1000 x 1000 µm<sup>2</sup> writing field in this example. Image: Thomas Pedersen. | |||
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=Development= | =Development= | ||