Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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The system can auto calibrate itself using the AE and BE stage marks. The system will automatically measure beam position at various locations of the writing field to determine position errors. A correction matrix will be applied and the beam position will be remeasured to validate the result. The sequence takes about 8 minutes to execute. This should be done every time beam current is changed, i.e. a new condition file is restored. The procedure is | The system can auto calibrate itself using the AE and BE stage marks. The system will automatically measure beam position at various locations of the writing field to determine position errors. A correction matrix will be applied and the beam position will be remeasured to validate the result. The sequence takes about 8 minutes to execute. This should be done every time beam current is changed, i.e. a new condition file is restored. The procedure is | ||
*From the '''Calibration''' window choose '''Commands''' and '''Batch''' | *From the '''Calibration''' window choose '''Commands''' at the top of the window and click '''Batch''' | ||
*From the '''BATCH parameter''' window click '''Condition file...''' | |||
*Browse for the '''daily''' file and click '''OK''' | |||
*Click '''Execute''' | |||
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Load the '''daily''' batch command and execute it. Image: Thomas Pedersen. | Load the '''daily''' batch command and execute it. Image: Thomas Pedersen. | ||
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At the end of the process the '''Calibration''' window will display '''Finished BATCH CALIB'''. | |||
=Development= | =Development= | ||