Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 379: Line 379:
*Select the '''Current''' subprogram and click '''Execute''' in the '''Calibration''' window
*Select the '''Current''' subprogram and click '''Execute''' in the '''Calibration''' window


The stage moves to the faraday cup to measure beam current. This takes 10-15 seconds and the '''Calibration''' window will display the measured beam current. Note this down for the Labmanager usage log.
The stage moves to the faraday cup to measure beam current. This takes 15 seconds and the '''Calibration''' window will display the measured beam current. Note this down for the Labmanager usage log.


{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"