Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

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 The SDF specifies which system condition file to use for the exposure, this determines the beam current. In this tutorial the chosen condition file is '''6nA_ap5'''. Thus we restore the system and cloumn to this condition file. This is done from the '''Calibration''' window, if it is not open it can be opened from the '''EBX Menu'''.
-*In the '''Calibration''' window press '''RESTOR'''
+*Select the '''RESTOR''' subprogram in the '''Calibration''' window
 *Click '''Select condition file...'''
 *Browse and select the 6nA_ap5 condition and click '''OK'''
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 | colspan="2" style="text-align:center;|
 '''Calibration''' and '''RESTOR''' windows. Image: Thomas Pedersen.
+|}
+==System self check==
+With the correct condition file restored the next step is to measure beam current and verify that it is close to the expected value (within 5%).
+*Select the '''Current''' subprogram and click '''Execute''' in the '''Calibration''' window
+The stage moves to the faraday cup to measure beam current. This takes 10-15 seconds and the '''Calibration''' window will display the measured beam current. Note this down for the Labmanager usage log.
+{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
+|-
+| [[image:9500current1.png|600px]]
+|-
+| colspan="1" style="text-align:center;|
+Result display of current measurement. Image: Thomas Pedersen.
 |}