Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 356: | Line 356: | ||
==Select and restore the system to the chosen beam current profile== | ==Select and restore the system to the chosen beam current profile== | ||
The SDF specifies which system condition file to use for the exposure, this determines the beam current. In this tutorial the chosen condition file is '''6nA_ap5'''. Thus we restore the system and cloumn to this condition file. This is done from the ''' | The SDF specifies which system condition file to use for the exposure, this determines the beam current. In this tutorial the chosen condition file is '''6nA_ap5'''. Thus we restore the system and cloumn to this condition file. This is done from the '''Calibration''' window, if it is not open it can be opened from the '''EBX Menu'''. | ||
*In the ''' | *In the '''Calibration''' window press '''RESTOR''' | ||
*Click '''Select condition file...''' | *Click '''Select condition file...''' | ||
*Browse and select the 6nA_ap5 condition and click '''OK''' | |||
*Click '''Edit parameter...''' | *Click '''Edit parameter...''' | ||
*Click '''Execute''' in the | *Click '''Execute''' in the '''RESTOR''' window | ||
The | The bottom line of the '''Calibration''' window will now display 'Received an intermediate result RESTOR(DEMAG)' to indicate it is working. Setting up for the new condition file takes about 1 minute and the bottom line will say 'Finished' when done and the system is ready to move on. | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||