Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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=Sample mounting= | =Sample mounting= | ||
The JEOL 9500 system uses a proprietary sample cassette format and thus each sample must be mounted in an appropriate cassette. Cassettes are available for wafer sizes from 2” to 8”. Smaller chips must be mounted in dedicated chip cassettes with slots of four different sizes available. For more information on available cassettes and their specifications please refer to the [[Specific Process Knowledge/Lithography/EBeamLithography/Cassettes|JEOL 9500 cassette specifications page.]] | |||
For the tutorial job we are using a 4" wafer and hence it must be mounted in one of the 4” cassettes, in this case the 4" aluminium cassette (BM2P-011). If a cassette has been used recently it might be found on the cassette preparation table already, otherwise it will have to be retrieved from the cassette transfer system. This is done from the operation screen of the cassette transfer system. | |||
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Retrieving a cassette from the automatic cassette transfer system | |||
*Toggle the system to "Local" operation mode | |||
*Identify the shelf number for the cassette in question | |||
*Use the "shelf selector" to choose that number | |||
*Press the transfer button to transfer it from the shelf to the port/door | |||
*Once the robot is done, click "Open" to unlock the door | |||
*Open door, retrieve cassette and place it on a layer of tissues on the cassette preparation table | |||
*Close the door | |||
*Click "Close" to lock the door | |||
*Set the system back to "Remote" operation | |||