Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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| 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|800px]] | | 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|800px]] | ||
|- | |- | ||
| 6" || BW6-042 || 6A || Al || | | 6" || BW6-042 || 6A || Al || [[image:BW6-042_cas.png|800px]] | ||
|- | |- | ||
| 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|800px]] | | 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|800px]] | ||
|} | |} | ||