Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
Appearance
| Line 45: | Line 45: | ||
| 6" || BW6-042 || 6A || Al || Image | | 6" || BW6-042 || 6A || Al || Image | ||
|- | |- | ||
| 8" || BSPCL-514 || 8A || Ti || | | 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|800px]] | ||
|} | |} | ||