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Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
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== Wafer cassettes ==
== Wafer cassettes ==
{| class="wikitable"
|+ Wafer cassette overview
|-
! Wafer size !! ID !! Slot ID !! Material !! Image
|-
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti ||
|-
| Example || Example || Example || Example || Example
|-
| Example || Example || Example || Example || Example
|}


== Chip cassettes ==
== Chip cassettes ==
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