Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 18: Line 18:
|-  
|-  
| colspan="1" style="text-align:center;|
| colspan="1" style="text-align:center;|
Back side and front side view of cassette BSPCL-520.
Back side (left )and front side view (right) of the 4" wafer titanium cassette (BSPCL-520).
|}
|}