Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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*Login to the support PC using your DTU credentials. | *Login to the support PC using your DTU credentials. | ||
*Open “FFFTP” | *Open “FFFTP” | ||
*Click “New connection” and fill the fields as shown below | *Click “New connection” and fill the fields as shown in the "Host Setting" window below | ||
*Password is "Jeoleb" | *Password is "Jeoleb" | ||
*Initial Local Folder should be your own M-drive or similar | *Initial Local Folder should be your own M-drive or similar | ||
Now you can click "Connect" in FFFTP and it opens with your drive on the left side and the JEOL9500 PC on the right hand side. You can now drag and drop files between the two folders. The SDF and JDF files go in the same folder, the pattern data however goes into a separate folder. The correct folders are: | |||
*SDF/JDF: /home/eb0/jeoleb/job/danchip | |||
*V30: /home/eb0/jeoleb/pattern/danchipv30 | |||
Once the files are transferred to the EBL control computer we can compile the files into a magazine file. The Unix interface has several desktops. Desktop one is used for EBL control and desktop two is used for file compilation. Switch to desktop two, select the terminal window and write “schd -exptime sdffilename”. | Once the files are transferred to the EBL control computer we can compile the files into a magazine file. The Unix interface has several desktops. Desktop one is used for EBL control and desktop two is used for file compilation. Switch to desktop two, select the terminal window and write “schd -exptime sdffilename”. | ||