Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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=Job file compilation= | =Job file compilation= | ||
At this stage we have a v30 file containing the pattern data and an SDF and JDF file describing the exposure parameters. These must be compiled into a magazine file (.mgn) which will completely define the exposure job. | At this stage we have a v30 file containing the pattern data and an SDF and JDF file describing the exposure parameters. These must be compiled into a magazine file (.mgn) which will completely define the exposure job. Magazine files are compiled directly on the control computer and hence the V30, SDF and JDF files have to be transferred to this computer using the FFFTP client available on the support PC. For first time use FFFTP has to be setup on your user account on the support PC. This is done by the following steps: | ||
*Login to the support PC using your DTU credentials. | |||
Login to the support PC using your DTU credentials. | |||
Open “FFTP” | Open “FFTP” | ||
Click “New connection” | Click “New connection” | ||
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If compilation is successful the terminal will provide a table of exposure sequences and their corresponding exposure times. Also, a .mgn file will be generated in the same folder as the SDF file. | If compilation is successful the terminal will provide a table of exposure sequences and their corresponding exposure times. Also, a .mgn file will be generated in the same folder as the SDF file. | ||
If compilation does not succeed the terminal will respond with a number of errors indicating which line(s) of the SDF or JDF file is causing the error. | If compilation does not succeed the terminal will respond with a number of errors indicating which line(s) of the SDF or JDF file is causing the error. | ||
=Job file verification= | =Job file verification= | ||