Specific Process Knowledge/Wafer and sample drying: Difference between revisions
No edit summary |
|||
| Line 12: | Line 12: | ||
|[[Specific_Process_Knowledge/Wafer_and_sample_drying #Spin dryers|Spin dryer 3]] | |[[Specific_Process_Knowledge/Wafer_and_sample_drying #Spin dryers|Spin dryer 3]] | ||
|[[Specific_Process_Knowledge/Wafer_and_sample_drying #Spin dryers|Spin dryer 5]] | |[[Specific_Process_Knowledge/Wafer_and_sample_drying #Spin dryers|Spin dryer 5]] | ||
|[[Specific_Process_Knowledge/Wafer_and_sample_drying/Critical Point Dryer|Critical point dryer]] | |[[Specific_Process_Knowledge/Wafer_and_sample_drying/Critical Point Dryer|Critical point dryer]] | ||
|[[Specific_Process_Knowledge/Wafer_and_sample_drying #Ethanol fume dryer|Ethanol fume dryer]] | |[[Specific_Process_Knowledge/Wafer_and_sample_drying #Ethanol fume dryer|Ethanol fume dryer]] | ||
| Line 28: | Line 25: | ||
| | | | ||
*F-3 | *F-3 | ||
| | | | ||
*D-3 | *D-3 | ||
| Line 51: | Line 42: | ||
*Drying | *Drying | ||
*Rinsing + drying | *Rinsing + drying | ||
| | | | ||
*Drying sensitive samples. E.g. with cantilevers | *Drying sensitive samples. E.g. with cantilevers | ||
| Line 76: | Line 61: | ||
*1-25 100 mm wafers | *1-25 100 mm wafers | ||
*1-25 150 mm wafers | *1-25 150 mm wafers | ||
*1-25 200 mm wafers | *1-25 200 mm wafers | ||
| | | | ||
*1 to 5 wafers per run. Sizes: 2”, 4" or 6" | *1 to 5 wafers per run. Sizes: 2”, 4" or 6" | ||
| Line 98: | Line 77: | ||
| | | | ||
*Only for RCA cleaned wafers | *Only for RCA cleaned wafers | ||
| | | | ||
*No restrictions | *No restrictions | ||