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Specific Process Knowledge/Etch/III-V ICP/GaAs-AlGaAs: Difference between revisions

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===GaAs/AlGaAs etching using III-V ICP===
===GaAs/AlGaAs etching using III-V ICP===
Work done by people from Photonics before 2011
'''''Work done by DTU Photonics before 2011'''''


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