Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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* Max. 150 <sup>o</sup>C/s | * Max. 150 <sup>o</sup>C/s | ||
|style="background:WhiteSmoke; color:black;" align="left"| Different heating rates can be set under temperature control | |style="background:WhiteSmoke; color:black;" align="left"| Different heating rates can be set under temperature control, as well as the step duration. | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||