Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
No edit summary |
No edit summary |
||
| Line 64: | Line 64: | ||
=sand box = | |||
{{ | |||
{{#sub:This is a string.|0|4}} | |||
Revision as of 13:06, 7 February 2023
Feedback to this page: click here
| Recipe | Step | Temperature | Pressure | C4F8 | SF6 | O2 | Ar | Coil | Platen | Runs | Key words |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Mediumiso1 | - | 20 | 25 | 0 | 150 | 0 | 0 | 600 | 3 | 1 | Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen |
| Isoslow7 | - | 10 | 10 | 0 | 80 | 0 | 0 | 150 | 3 | 1 | |
| - |
=sand box =
{{#sub:This is a string.|0|4}}