Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
| Line 68: | Line 68: | ||
The etch rates have not yet been calibrated at DTU Nanolab. | The etch rates have not yet been calibrated at DTU Nanolab. | ||
The temperature is 22 degC +/- 1 degC. | The temperature is 22 degC +/- 1 degC. | ||
<!-- copyright issue rkc | |||
{| border="1" style="text-align: center; width: 800px; height: 100px;" | {| border="1" style="text-align: center; width: 800px; height: 100px;" | ||
| Line 106: | Line 108: | ||
'''(1)''' The etch rates have not yet been calibrated at DTU Nanolab. | '''(1)''' The etch rates have not yet been calibrated at DTU Nanolab. | ||
--> | |||
<br> | <br> | ||