Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
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The temperature is 22 degC +/- 1 degC. | The temperature is 22 degC +/- 1 degC. | ||
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==H2SO4:H2O2:H2O etch== | ==H2SO4:H2O2:H2O etch== | ||