Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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* Between 0.1s and 2h46min | * Between 0.1s and 2h46min | ||
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!style="background:Silver; color:black" align="center" align="center" rowspan="1"|Heating rate | |||
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* Max. 150 <sup>o</sup>C/s | |||
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