Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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*up to 12 mbar | *up to 12 mbar | ||
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!style="background:Silver; color:black" align="center" align="center" rowspan="1"|Process time | |||
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* Between 0.1s and 9999s | |||
|style="background:WhiteSmoke; color:black;" align="left"|The maximum temperature allowed is '''dependent''' on both '''processing type''' and '''time'''. | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||