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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,530 edits
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! width="320" |  
! width="320" |  


|+'''Camera views during alignment on Aligner: Maskless 03'''
|+'''Camera views during alignment on Aligner: Maskless 03. Screenshots by Thomas Anhøj @ DTU Nanolab, 2019.'''
|- border="0" align="center"
|- border="0" align="center"
|[[Image:MLA150 TSA Overview.JPG|300px]]
|[[Image:MLA150 TSA Overview.JPG|300px]]
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==Back Side Alignment==
==Back Side Alignment==


[[Image:MLA150_BSA_Backside.JPG|300x300px|thumb|Image of a BSA alignment mark during alignment. The mark is 300µm wide. The blue cross-hair is ~18µm. ]]
[[Image:MLA150_BSA_Backside.JPG|300x300px|thumb|Image of a BSA alignment mark during alignment. The mark is 300µm wide. The blue cross-hair is ~18µm. Screenshot by Thomas Anhøj @ DTU Nanolab, 2019.]]


'''Overlay accuracy (spec):''' 1.0µm
'''Overlay accuracy (spec):''' 1.0µm
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! width="320" |  
! width="320" |  


|+'''Substrate view during backside alignment'''
|+'''Substrate view during backside alignment. Screenshots by Thomas Anhøj @ DTU Nanolab, 2019.'''
|- border="0" align="center"
|- border="0" align="center"
|[[Image:MLA150 BSA 2inch.JPG|300px]]
|[[Image:MLA150 BSA 2inch.JPG|300px]]
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