Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch: Difference between revisions
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==SiO2 Etch using aSi as masking material== | ==SiO2 Etch using aSi as masking material== | ||
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I am now starting up development of SiO2 etch using aSi as masking material. <br> | I am now starting up development of SiO2 etch using aSi as masking material. <br> | ||
The samples I use are: | The samples I use are: | ||