Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Barc Etch: Difference between revisions
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==Barc etch with O2== | ==Barc etch with O2== | ||
'' | {{CC-bghe2}}''June 2020'' | ||
===Sample=== | ===Sample=== | ||
*6" Si | *6" Si | ||
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,319 edits No edit summary |
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,319 edits |
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==Barc etch with O2== | ==Barc etch with O2== | ||
'' | {{CC-bghe2}}''June 2020'' | ||
===Sample=== | ===Sample=== | ||
*6" Si | *6" Si | ||