Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions

@@ Line 82: / Line 82: @@
-Beamer provides three methods of defining a PSF. Either load
+Beamer provides three methods of defining a PSF:
+*Load a pre-computer PSF from the archives
+*Use a guassian approximation and enter the variables values
+*Use a nummerical PSF
+The pre-computed PSF can be loaded from either a separate file, from the local archive or from the global archive. In any case the file will probably originate from a Tracer simulation, for more on this visit our Tracer page. It can be advantageus to place your PSF in the global (network) archive such that it is available on the Beamer PC in the cleanroom as well as the Beamer PC outside the cleanroom.
+A guassian approximation is mostly useful if trying to replicate a result from litterature or if one has worked deliberately towards determining the gaussian constants for a particular process.
 [[File:BeamerPEC2.png|1250px|center|frameless]]