Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*Aluminium | *Aluminium | ||
*Chromium (ONLY RIE2!) | *Chromium (ONLY RIE2!) | ||
*Other metals if they cover less than 5% of the wafer area (ONLY RIE2!) | |||
| | | | ||
*Photoresist | *Photoresist | ||