Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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Practically any sample that will fit inside the spray coater can be processed. Spray patterns are easily programmed either using predefined spray patterns (1D line, 2D rectangles/circles/meanders/spirals) or custom 3D spray patterns. | Practically any sample that will fit inside the spray coater can be processed. Spray patterns are easily programmed either using predefined spray patterns (1D line, 2D rectangles/circles/meanders/spirals) or custom 3D spray patterns. | ||
The spray coating process as well as major features of the three nozzles are described into more detail in the manual which can be found via the Equipment Info page in LabManager under the Documents sections. The manual can also be found | The spray coating process as well as major features of the three nozzles are described into more detail in the manual which can be found via the Equipment Info page in LabManager under the Documents sections. The manual can also be found in [http://labmanager.dtu.dk/d4Show.php?id=2523&mach=293 Labmanager] - '''requires login''' | ||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager]''' | Further information about the spray coater (manual, process log, technical information etc.) can be found in LabManger: | ||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager] - '''requires login''' | |||
== Process development== | == Process development== | ||
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The TI spray resist is the standard spray coater resist used at DTU Nanolab. It requires no dilution and performs well. | The TI spray resist is the standard spray coater resist used at DTU Nanolab. It requires no dilution and performs well. | ||
''' Spray coating using other resists:''' | |||
''' Spray coating using other resists:'''<br> | |||
Other resists are allowed, but most require dilution, as the spray coater will not work with any resist viscosity higher than 20 cP. | Other resists are allowed, but most require dilution, as the spray coater will not work with any resist viscosity higher than 20 cP. | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||